| Series | - |
| Package | Tray |
| Part Status | Obsolete |
| Type | - |
| Axis | - |
| Acceleration Range | - |
| Sensitivity (LSB/g) | - |
| Sensitivity (mV/g) | - |
| Bandwidth | - |
| Output Type | - |
| Voltage - Supply | - |
| Features | - |
| Operating Temperature | - |
| Mounting Type | Surface Mount |
| Package / Case | 14-TFLGA |
| Supplier Device Package | 14-LGA (3x5) |
